Coating machine

PHOTO LITHOGRAPHYPHOTOLITHOGRAPHY

Coating machine

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Coating machine

Coating machine

more

Dip coater

Dip coater

more

Spray coater

Spray coater

more

 

Coating machine

 

One example of photolithography process

One example of photolithography process

 

Coating machines form films onto coating objects including base materials such as glass, semiconductor wafers, and metal films. Coating methods can be generally classified into wet coating and dry coating.

 

“Wet coating” is a method to coat objects with liquid coating materials such as liquid photoresists and hot-melt adhesives. Representative wet coating machines are listed as follows.

 

  • ・Dip coater
  • ・Spray coater
  • ・Spin coater
  • ・Roll coater
  • ・Slit coater

 

 

“Dry coating” is a method to form films in a vacuum. There are vapor deposition machines and sputtering coaters.

 

NSC Engineering has been fabricating a large number of wet photoresists coaters up to the present. We have fabrication records not only in coaters but also in compound lines combining coaters with other equipment such as pre-treatment equipment or loader/ unloader systems.

 

The following machine is an example from our supply records.

 

Dip coater

Dip coater

ディップコーター

Dip coater

Features

NSC Engineering’s dip coater is capable of coating multiple workpieces simultaneously as well as achieving uniformity in coating even on workpieces with a complex uneven shape.

 

The coater’s processing tanks are equipped with automatic temperature regulating function. With this function, viscosity and temperature of the coating material, which are essential control items in coating process, can be stably maintained.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Thickness of work
0.5~0.7mm
Size of work
~450mm×500mm
Chemicals mainly used
Organic photoresist
Process capacity
Approx. 22,800 sheets/ month
Takt time
Approx. 480 secs. / 5 sheets
Standard delivery time
4 months
Safety measure
Automatic fire extinguisher attached
Operation system
Manual operation
Control system
Relay control
System standard
JIS, Japanese Industrial Standard
 

Spray coater

Spray coater

Features

NSC Engineering’s spray coater coats the coating objects with sprays, which give the coating process ability to deal with workpieces in many shapes from a plane shape to a complicated 3D shape.

 

As coating process can be conducted without touching the base materials, defects such as dimples are hardly caused. Single-sided coating and double-sided coating can be selected from its spray controlling system.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Size of work
~ 36 inches× 58 inches
Chemicals mainly used
Organic photoresist
Standard delivery time
4 months
Safety measure
Interlocks at each spot
Operation system
Automatic operation
Control system
PLC control
System standard
JIS, Japanese Industrial Standard

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