Developing machine

PHOTO LITHOGRAPHYPHOTOLITHOGRAPHY

Developing machine

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Development

Development

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Developer solution

Developer solution

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Developing process

Developing process

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Chemical supply system

Chemical supply system

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Standing-position conveyance developing machine

Standing-position conveyance developing machine

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Horizontal conveyance developing machine

Horizontal conveyance developing machine

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Immersion-type developing machine

Immersion-type developing machine

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Hanger-type developing machine

Hanger-type developing machine

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Manual developing machine

Manual developing machine

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Development

Patterns are baked on substrates (printed substrates or glass substrates) coated with photoresist in exposure process, and in developing process, photoresist on the required parts of the patterns only will be left so as to protect these parts from etching in the next process; meanwhile, photoresist on the unnecessary parts of the patterns will be dissolved.

 

NSC Engineering has various kinds of fabrication records from developing machines in individual unit to in-line specifications integrated with post-bake equipment.

 

Developer solution

Alkali aqueous solution and organic solvent-based developing solution are mainly used, and sometimes it depends on the workpiece or photoresist.

 

 

Developing process

Developing process is mainly conducted as the following procedure.

 

The purpose of developing process is to dissolve the unnecessary photoresist while keeping the remaining photoresist on the required parts of pattern.

 

Sometimes in order to perform development smoothly, pre-bake process, in which water or organic solvent components are driven off the photoresist, is conducted after exposure process and before developing process.

 

 

After development, a small amount of water content or developer solution components may adhere on the workpieces. In some cases, in order to drive off the water content and developer solution components, post-bake process will be conducted before etching process.

 

For smooth workpiece delivery between the preceding process and later process, at NSC Engineering, specification design for loader/ unloader system are also provided in accordance with customers’ requirement.

 
 

Chemical supply system

It is essential to stabilize the developer solution during developing process. Development quality can be stabilized as long as the developer’s concentration, temperature, and supplement are kept in the best condition.

 

When designing the developing machine, NSC Engineering also provides chemical supply system if the situation requires.

 

Standing-position conveyance developing machine

Standing-position conveyance developing machine

Features

This machine has raising mechanisms which raise the workpieces lain flat on the machine to a standing position by an angle around 80 degrees. The workpieces are conveyed in this standing position during developing process.

 

Developing, cleaning, and drying are performed coherently as a whole process.

 

NSC Engineering provides the suitable design according to the size of workpiece and chemicals to use.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Thickness of work
1.8~2.8mm
Size of work
L=2333mm、W=1663mm
Chemicals mainly used
Alkaline developer solution
Takt time
Approx. 75 secs.
Standard delivery time
4 months
Safety measure
Interlocks at each spot
Operation system
Automatic operation
Control system
PLC control
System standard
JIS, Japanese Industrial Standard
 

Horizontal conveyance developing machine

Horizontal conveyance developing machine

Features

This machine performs developing process while conveying the workpieces in horizontal direction.

 

Developing, cleaning, and drying are performed coherently as a whole process.

 

NSC Engineering provides the suitable design according to the size of workpiece and chemicals to use.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Thickness of work
1.8~2.8mm
Size of work
L=1700mm、W=2300mm
Chemicals mainly used
Alkaline developer solution
Takt time
Approx. 75 secs.
Standard delivery time
4 months
Safety measure
Interlocks at each spot
Operation system
Automatic operation
Control system
PLC control
System standard
JIS, Japanese Industrial Standard
 

Immersion-type developing machine

Immersion-type developing machine

Features

This machine performs developing process through immersion.
Along with our chemical supply system, developer solution can be supplemented stably.

 

NSC Engineering provides the suitable design according to the size of workpiece and chemicals to use.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Thickness of work
5.0mm
Size of work
32 inches × 28 inches
Chemicals mainly used
Alkaline developer solution
Standard delivery time
3 months
Safety measure
Interlocks at each spot
Operation system
Semi-automatic operation
Control system
PLC control
System standard
JIS, Japanese Industrial Standard
 

Hanger-type developing machine

Hanger-type developing machine

Features

This machine performs developing process while conveying the workpieces in horizontal direction (in individual process type).

 

Developing, cleaning, and drying are performed coherently as a whole process.

 

NSC Engineering provides the suitable design according to the size of workpiece and chemicals to use.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Metals
Thickness of work
Depending on process conditions
Size of work
350×600mm
Chemicals mainly used
Alkaline developer solution
Standard delivery time
4 months
Safety measure
Interlocks at each spot
Operation system
Semi-automatic operation
Control system
PLC control
System standard
JIS, Japanese Industrial Standard
 

Manual developing machine

Manual developing machine

Features

Operation of NSC Engineering’s manual developing machine can be manual or semi-automatic.

 

This machine processes one workpiece at a time, which matches the needs of small-quantity production and trial production.

Specification examples in our machine supply records

Item
Fabrication record
Material of work
Glass
Thickness of work
5.0mm
Size of work
32 inches × 28 inches
Chemicals mainly used
Alkaline developer solution
Process capacity
1 sheet/ process
Standard delivery time
1 month
Safety measure
Interlocks at each spot
Operation system
Semi-automatic operation
Control system
PLC control, relay control
System standard
JIS, Japanese Industrial Standard

Additional examples from our machine supply records

NSC Engineering provides machine design & fabrication in accordance with customers’ various scenes.

Item
Fabrication record
Material of work
Stainless steel, 42 alloy, DFR, PET, glass
Developer solution
TMAH, sodium carbonate, and others

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